Piezoelectric layer arrangements in acoustic wave devices and related methods

Abstract

Acoustic wave devices, and particularly piezoelectric layer arrangements in acoustic wave devices and related methods are disclosed. Acoustic wave devices may include a piezoelectric layer on a carrier substrate. The piezoelectric layer is formed with a thickness that is varied or shaped across different portions of the carrier substrate. Different piezoelectric layer thicknesses on a common carrier substrate may be provided for different surface acoustic wave (SAW) filter structures that are formed monolithically, for different sets of resonators within a single filter structure, and for different regions within a single SAW device in one or more of the transverse direction or the propagation directions. Shaping piezoelectric layers may include selectively removing or adding portions of the piezoelectric layer. In this manner, piezoelectric layer thicknesses at different hierarchy levels within SAW devices and filters may be tailored to provide different acoustic resonator properties without requiring separately formed devices on separate substrates.

Dependencies are inferred from the claim text.