Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorTetsuya KIMURA
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AssigneeMurata Manufacturing Co., Ltd.
InventorTetsuya KIMURA
Estimating the term…
An acoustic wave device includes a support with a thickness in a first direction, a piezoelectric layer in the first direction, and an interdigital transducer electrode in the first direction with first electrode fingers in a second direction, a first busbar electrode connected to the first electrode fingers, second electrode fingers in the second direction and facing corresponding ones of the first electrode fingers in a third direction, and a second busbar electrode connected to the second electrode fingers. The support has a hollow at least partially overlapping the interdigital transducer electrode. The piezoelectric layer has at least one first through hole penetrating the piezoelectric layer between at least one first electrode finger and the second busbar electrode. The first through hole communicates with the hollow, and overlaps an end portion of the at least one first electrode finger that is not connected to the first busbar electrode.
An acoustic wave device comprising:
stic wave device according to claim 14, wherein d/p≤about 0.5 is satisfied, where d is a thickness of the piezoelectric layer and p is a center-to-center distance between adjacent first and second electrode fingers.
The acoustic wave device according to claim 15, wherein d/p is less than or equal to about 0.24.
Dependencies are inferred from the claim text.