Mems resonator with high quality factor and its use
AssigneeKYOCERA Tikitin Oy
InventorsAarne OJA, Antti Jaakkola, Panu KOPPINEN
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Abstract
A MEMS (microelectromechanical system) resonator with a material layer of single-crystalline silicon, at least one layer made of material with low thermal diffusivity to reduce thermoelastic dissipations in the MEMS resonator, a layer of piezoelectric material, and a layer made of electrically conducting material. The said-layer with low thermal diffusivity is between the single-crystalline silicon layer and the piezoelectric layer, or between the piezoelectric layer and the electrically conducting layer. The use of a material layer of low thermal diffusivity.
Claims18
A MEMS (microelectromechanical system) resonator comprising:
- a material layer of single-crystalline silicon;
- at least one layer made of material with low thermal diffusivity;
- a layer of piezoelectric material;
- and
- a layer made of electrically conducting material, wherein the said layer with low thermal diffusivity is between the said single-crystalline silicon layer and the said piezoelectric layer, or between the said piezoelectric layer and the said electrically conducting layer.
Use of a material layer of low thermal diffusivity to reduce thermoelastic dissipations in a MEMS resonator by applying the said material layer between a single-crystalline silicon layer and a piezoelectric layer and/or between the piezoelectric layer and an electrically conducting layer.
Dependencies are inferred from the claim text.