Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorTetsuya KIMURA
Life of this patent
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AssigneeMurata Manufacturing Co., Ltd.
InventorTetsuya KIMURA
Estimating the term…
An acoustic wave device includes a support with a thickness in a first direction, a piezoelectric layer in the first direction, and an interdigital transducer electrode in the first direction with first electrode fingers in a second direction, a first busbar electrode connected to the first electrode fingers, second electrode fingers in the second direction and facing corresponding ones of the first electrode fingers in a third direction, and a second busbar electrode connected to the second electrode fingers. The support has a hollow adjacent to the piezoelectric layer and at least partially overlapping the interdigital transducer electrode. The piezoelectric layer has a first through hole penetrating the piezoelectric layer between at least one first electrode finger and the second busbar electrode. The first through hole communicates with the hollow, has a length in the third direction, and overlaps a portion of a second electrode finger.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.