Flexible contactor and method of manufacturing the same
AssigneeWithmems Co., Ltd.
InventorsHwang Sub KOO, Jong Koon PARK, Ki Sang YUN, Kyung Ho KIM
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AssigneeWithmems Co., Ltd.
InventorsHwang Sub KOO, Jong Koon PARK, Ki Sang YUN, Kyung Ho KIM
Estimating the term…
A flexible contactor that electrically connects a pad of an inspection target object with a pad of an inspection device includes, a first elastic part configured to contain a first conductive particle and be formed elastically deformable; and a second elastic part, which is connected in parallel to the first elastic part in a longitudinal direction, configured to contain a second conductive particle and be formed elastically deformable. The first elastic part and the second elastic part are different from each other in at least one of physical properties including hardness, Young's modulus, and resistivity.
A flexible contactor that electrically connects a pad of an inspection target object with a pad of an inspection device, comprising,
A method of manufacturing a flexible contactor that electrically connects a pad of an inspection target object with a pad of an inspection device, comprising,
Dependencies are inferred from the claim text.