Heat pipe for vertically stacked field effect transistors
AssigneeInternational Business Machines Corporation
InventorsTerence Hook, Brent A. Anderson, Anthony I. Chou
Life of this patent
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Abstract
A heat pipe is provided as an electrically inactive structure to dissipate heat that is generated by vertically stacked field effect transistors (FETs). The heat pipe is present in an electrically inactive device area which is located adjacent to an electrically active device area that includes the vertically stacked FETs. The heat pipe includes at least one vertical interconnect structure that continuously extends between each tier of the vertically stacked FETs
Claims20
A semiconductor structure comprising:
- vertically stacked field effect transistors located in an electrically active device area of the semiconductor structure;
- and
- an electrically inactive structure located in an electrically inactive device area of the semiconductor structure that is located adjacent to the electrically active device area of the semiconductor structure, wherein the electrically inactive structure comprises at least one vertical interconnect structure that continuously extends from an uppermost layer of the vertically stacked field effect transistors to a bottommost layer of the vertically stacked field effect transistors.
An electrically inactive structure located in an electrically inactive device area that is located adjacent to an electrically active device area comprising vertically stacked field effect transistors, wherein the electrically inactive structure comprises:
- at least one vertical interconnect structure that continuously extends from an uppermost layer of the vertically stacked field effect transistors to a bottommost layer of the vertically stacked field effect transistors and is configured to dissipate heat generated by the vertically stacked field effect transistors into a semiconductor substrate that is located beneath the vertically stacked field effect transistors.
Dependencies are inferred from the claim text.