Positioning method

A positioning method of positioning a reference position of a first image capturing unit and a reference position of a second image capturing unit with respect to each other in a processing apparatus,

• the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, the first image capturing unit disposed on the side of a surface of the holding table, and the second image capturing unit disposed on the side of another surface of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane,
• the positioning method comprising:
• a third storing step of detecting coordinates (X11, Y11) of a rotation center on the side of the surface of the holding table with the first image capturing unit and storing the detected coordinates as a new first reference position;
• a fourth storing step of detecting coordinates (X21, Y21) of a rotation center on the side of the other surface of the holding table with the second image capturing unit and storing the detected coordinates as a new second reference position;
• after the third storing step and the fourth storing step, a first deviation calculating step of calculating a first deviation between coordinates (X10, Y10) of a rotation center on the side of the surface of the holding table that have been detected with the first image capturing unit and stored in advance as a first reference position in the processing apparatus and the coordinates (X11, Y11);
• after the third storing step and the fourth storing step, a second deviation calculating step of calculating a second deviation between coordinates (X20, Y20) of a rotation center on the side of the other surface of the holding table that have been detected with the second image capturing unit and stored in advance as a second reference position in the processing apparatus, the coordinates (X20, Y20) corresponding to the coordinates (X10, Y10) on the XY plane, and the coordinates (X21, Y21);
• a first correcting step of correcting a coordinate system of images captured by the first image capturing unit, in order to eliminate the first deviation;
• and
• a second correcting step of correcting a coordinate system of images captured by the second image capturing unit, in order to eliminate the second deviation.

A positioning method of positioning a reference position of a third image capturing unit and a reference position of a fourth image capturing unit with respect to each other in a processing apparatus,

• the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, and the third and fourth image capturing units disposed on the side of a surface of the holding table in thicknesswise directions of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane,
• the positioning method comprising:
• a first storing step of detecting coordinates (X30, Y30) of a rotation center on the side of the surface of the holding table with the third image capturing unit and storing the detected coordinates as a third reference position;
• a second storing step of detecting coordinates (X40, Y40) of a rotation center on the side of the surface of the holding table, the coordinates (X40, Y40) corresponding to the coordinates (X30, Y30) on the XY plane, with the fourth image capturing unit and storing the detected coordinates as a fourth reference position;
• after the first storing step and the second storing step, a third storing step of detecting coordinates (X31, Y31) of a rotation center on the side of the surface of the holding table with the third image capturing unit and storing the detected coordinates as a new third reference position;
• after the first storing step and the second storing step, a fourth storing step of detecting coordinates (X41, Y41) of a rotation center on the side of the surface of the holding table with the fourth image capturing unit and storing the detected coordinates as a new fourth reference position;
• after the third storing step and the fourth storing step, a first deviation calculating step of calculating a first deviation between the coordinates (X30, Y30) and the coordinates (X31, Y31);
• after the third storing step and the fourth storing step, a second deviation calculating step of calculating a second deviation between the coordinates (X40, Y40) and the coordinates (X41, Y41);
• a first correcting step of correcting a coordinate system of images captured by the third image capturing unit, in order to eliminate the first deviation;
• and
• a second correcting step of correcting a coordinate system of images captured by the fourth image capturing unit, in order to eliminate the second deviation.

A positioning method of positioning a reference position of a third image capturing unit and a reference position of a fourth image capturing unit with respect to each other in a processing apparatus,

• the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, and the third and fourth image capturing units disposed on the side of a surface of the holding table in thicknesswise directions of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane,
• the positioning method comprising:
• a third storing step of detecting coordinates (X31, Y31) of a rotation center on the side of the surface of the holding table with the third image capturing unit and storing the detected coordinates as a new third reference position;
• a fourth storing step of detecting coordinates (X41, Y41) of a rotation center on the side of the surface of the holding table with the fourth image capturing unit and storing the detected coordinates as a new fourth reference position;
• after the third storing step and the fourth storing step, a first deviation calculating step of calculating a first deviation between coordinates (X30, Y30) of a rotation center on the side of the surface of the holding table that have been detected with the third image capturing unit and stored in advance as a third reference position in the processing apparatus and the coordinates (X31, Y31);
• after the third storing step and the fourth storing step, a second deviation calculating step of calculating a second deviation between coordinates (X40, Y40) of a rotation center on the side of the surface of the holding table that have been detected with the fourth image capturing unit and stored in advance as a fourth reference position in the processing apparatus, the coordinates (X40, Y40) corresponding to the coordinates (X30, Y30) on the XY plane, and the coordinates (X41, Y41);
• a first correcting step of correcting a coordinate system of images captured by the third image capturing unit, in order to eliminate the first deviation;
• and
• a second correcting step of correcting a coordinate system of images captured by the fourth image capturing unit, in order to eliminate the second deviation.

An updating method of updating a reference position of a first image capturing unit and a reference position of a second image capturing unit in a processing apparatus,

• the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, the first image capturing unit disposed on the side of a surface of the holding table, and the second image capturing unit disposed on the side of another surface of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane,
• the updating method comprising:
• a first storing step of detecting coordinates (X10, Y10) of a rotation center on the side of the surface of the holding table with the first image capturing unit and storing the detected coordinates as a first reference position;
• a second storing step of detecting coordinates (X20, Y20) of a rotation center on the side of the other surface of the holding table, the coordinates (X20, Y20) corresponding to the coordinates (X10, Y10) on the XY plane, with the second image capturing unit and storing the detected coordinates as a second reference position;
• after the first storing step and the second storing step, a third storing step of detecting coordinates (X11, Y11) of a rotation center on the side of the surface of the holding table with the first image capturing unit, updating the coordinates (X10, Y10) into the coordinates (X11, Y11), and storing the coordinates (X11, Y11) as the first reference position;
• and
• after the first storing step and the second storing step, a fourth storing step of detecting coordinates (X21, Y21) of a rotation center on the side of the other surface of the holding table with the second image capturing unit, updating the coordinates (X20, Y20) into the coordinates (X21, Y21), and storing the coordinates (X21, Y21) as the second reference position.

An updating method of updating a reference position of a third image capturing unit and a reference position of a fourth image capturing unit in a processing apparatus,

• the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, and the third and fourth image capturing units disposed on the side of a surface of the holding table in thicknesswise directions of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane,
• the updating method comprising:
• a first storing step of detecting coordinates (X30, Y30) of a rotation center on the side of the surface of the holding table with the third image capturing unit and storing the detected coordinates as a third reference position;
• a second storing step of detecting coordinates (X40, Y40) of a rotation center on the side of the surface of the holding table, the coordinates (X40, Y40) corresponding to the coordinates (X30, Y30) on the XY plane, with the fourth image capturing unit and storing the detected coordinates as a fourth reference position;
• after the first storing step and the second storing step, a third storing step of detecting coordinates (X31, Y31) of a rotation center on the side of the surface of the holding table with the third image capturing unit, updating the coordinates (X30, Y30) into the coordinates (X31, Y31), and storing the coordinates (X31, Y31) as the third reference position;
• and
• after the first storing step and the second storing step, a fourth storing step of detecting coordinates (X41, Y41) of a rotation center on the side of the surface of the holding table with the fourth image capturing unit, updating the coordinates (X40, Y40) into the coordinates (X41, Y41), and storing the coordinates (X41, Y41) as the fourth reference position.