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US 2023/0408909 A1Published application
Pellicle frame and pellicle
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYu YANASE
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Abstract
The present invention is to provide a pellicle frame characterized by including a metal or alloy having a linear expansion coefficient of 10×10−6 (1/K) or less and further a density of 4.6 g/cm3 or less, and a pellicle characterized by including the pellicle frame as an element.
Claims30
A pellicle frame having two end faces in a quadrilateral frame shape, having a recessed portion provided on one of said two end faces and having a plurality of holes on an outer side face, wherein the recessed portion and the hole are arranged apart from each other in a length direction of the frame.
Dependencies are inferred from the claim text.