Method for manufacturing a set of electronic components on the front of a semiconductor substrate
AssigneeExagan
InventorsMatthieu NONGAILLARD, Thomas OHEIX
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AssigneeExagan
InventorsMatthieu NONGAILLARD, Thomas OHEIX
Estimating the term…
The invention concerns a method of manufacturing an assembly of electronic components on a front surface of a semiconductor substrate comprising a plurality of field areas, each field area comprising at least one field and each field comprising at least one electronic component, the method comprising a plurality of photolithography steps to form a stack of layers forming each electronic component, each photolithography step defining a mask level and comprising the application of a mask successively on each field in photolithography equipment, the positioning of said mask on each field being performed relative to a reference mask level, one of the masks being designated as identification mask. The manufacturing method is remarkable in that: at the photolithography step defining a mask level associated with the identification mask, said mask is positioned with a predetermined offset with respect to the reference mask level, the offset being different for each field area, the electronic component(s) of a field area have an identification element appearing as a predetermined offset between a pattern defined at the reference mask level and a pattern defined at the identification mask level.
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.