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US 2023/0408729 A1Published application
Meta-Optics Element And Manufacture Method Thereof
AssigneeNational Central University
InventorsChih-Ming Wang, Wei-Lun Hsu, Yu-Hsuan Liao
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Abstract
The present invention discloses a meta-optics element comprising a substrate, a meta-optics structure and an anti-reflection structure. The meta-optics structure comprises multiple meta-optics units geometrically disposed on the substrate. The anti-reflection structure comprises multiple anti-reflection units corresponding to these meta-optics units and disposed on the surface of the corresponding meta-optics units. Besides, a manufacture method of meta-optics element is also disclosed.
Claims10
A meta-optics element comprising:
- a substrate;
- a meta-optics structure comprising multiple meta-optics units disposed on the substrate in a geometric manner;
- and
- an anti-reflection structure comprising multiple anti-reflection units corresponding to the meta-optics units and disposed on the surface of the corresponding meta-optics units.
1 more element
A manufacture method of a meta-optics element, comprising:
- providing a substrate;
- forming an optical composite layer on the substrate and defining an optical pattern;
- and
- forming a meta-optics structure and an anti-reflection structure via etching the optical composite layer with the optical pattern, wherein the meta-optics structure comprises multiple meta-optics units, and the anti-reflection structure comprises multiple anti-reflection units corresponding to the meta-optics units.
1 more element
Dependencies are inferred from the claim text.