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US 2023/0408546 A1Published application
Method of in situ modulation of structural material properties and/or template shape
AssigneeMicrofabrica Inc.
InventorOnnik Yaglioglu
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Abstract
Probe structures, probe arrays, have varying intrinsic material properties along their lengths. Methods of forming probes and probe arrays comprise varying the plating parameters to provide varying intrinsic material properties. Some embodiments provide deposition templates created using multiphoton lithography to provide probes with varying lateral configurations along at least portion of their lengths.
Claims35
A probe array, comprises:
- (a) a plurality of probes, comprising:
- (i) an elastically deformable body portion having a first end and a second end;
- (ii) a first contact region connected directly or indirectly to the first end of the elastically deformable body portion;
- and
- (iii) a second contact region connected directly or indirectly to the second end of the elastically deformable body portion,
- wherein multiple probes of the plurality of probes comprise at least one first portion made of at least one selected material located within at least two different second portions along a length of each of the multiple probes wherein the at least one selected material at the at least two different second portions has at least one intrinsic material property having a first value being different from a second value of the intrinsic material property of the at least one selected material at the at least one first portion, the at least one selected material being the structural material forming at least a portion of the probes;
- and
- (b) at least one retention structure holding the plurality of probes in an array pattern desired for the probe array.
5 more elements
A method of forming a probe array, comprising:
- (a) forming a plurality of probes, comprising:
- (i) providing a probe substrate;
- directly or indirectly on the probe substrate, providing at least one patterned template with a plurality of openings;
- (ii) providing a structural material into the plurality of openings to form at least a portion of the plurality of probes,
- wherein the providing of the structural material comprises varying intrinsic properties of the structural material at different heights along a length of the probes;
- and
- (b) providing at least one probe array retention structure to engage the plurality of probes according to an array pattern desired for the probe array.
4 more elements
Dependencies are inferred from the claim text.