System and method for monitoring purity of fluid

Abstract

A system and a corresponding method for monitoring the purity of fluid are described. The system includes a duct (2) connecting to a fluid source (1), which includes a first valve (212) for controlling the fluid flowing from the fluid source (1) into the duct (2), or portions thereof, as a sample, a purity sensor (22) disposed downstream of the first valve (212), and one or more pressure regulators for controlling pressure within the duct (2), or portions thereof. The duct (2), or portions thereof, is of an environment with a desired pressure for measuring a purity level of the sample by the purity sensor (212).

Dependencies are inferred from the claim text.