X-ray fluorescence analyzer

Abstract

An X-ray fluorescence analyzer includes a sample stage having an opening, the sample stage being configured to place a sample thereon so that the sample is exposed from the opening, an X-ray source for irradiating the sample with primary X-rays from below the sample stage through the opening, and a detector for detecting fluorescence X-rays generated from the sample. It further includes an analyzer for analyzing the constituent elements based on the fluorescence X-rays, a measuring device for measuring a height of a surface of the sample exposed from the opening, a determination unit for determining whether a height difference between the height measured by the measuring device and a height of the upper surface of the sample stage is within a tolerance, and a notification unit for notifying a determination result of the determination unit. With this, the reliability of the analysis result can be recognized.

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