System and method for reducing sample noise using selective markers

A patterned wafer, the patterned wafer comprising:

• a multi-layer stack, the multi-layer stack including a plurality of layers, the plurality of layers including at least a first layer and one or more additional layers, the first layer positioned on a top surface of the multi-layer stack, the one or more additional layers positioned below the first layer positioned on the top surface of the multi-layer stack,
• the first layer comprising:
• a first material, wherein the first material includes a light transmissive material;
• a second material, wherein the second material includes a light reflective material;
• one or more absorptive markers configured to selectively bind to the light transmissive material to absorb one or more illumination beams to block light transmission through the one or more additional layers positioned below the first layer positioned on the top surface of the multi-layer stack;
• and
• one or more photoluminescent markers configured to selectively bind to the light reflective material to enhance a feature of interest,
• the one or more additional layers comprising at least the second material, wherein the second material includes the light reflective material.

A method, the method comprising:

• generating one or more illumination beams using an illumination source;
• directing the one or more illumination beams to a sample using a set of optical elements, the sample including a multi-layer stack of a plurality of layers, the plurality of layers formed of at least a first material and at least a second material, the first material including a light transmissive material, the second material including a light reflective material, a top layer of the plurality of layers within the multi-layer stack including one or more absorptive markers configured to selectively bind to the light transmissive material of the top layer, the one or more absorptive markers configured to absorb the one or more illumination beams from the illumination source to block light transmission through one or more layers positioned below the top layer, the top layer including one or more photoluminescent markers configured to selectively bind to the light reflective material to enhance a feature of interest on the sample;
• absorbing the one or more illumination beams using the one or more absorptive markers selectively bound to the light transmissive material of the top layer to block light transmission through the one or more layers positioned below the top layer;
• and
• detecting photoluminescent emission emitted preferentially from the one or more photoluminescent markers of the sample using one or more detectors.