Measuring method, measuring apparatus, lithography apparatus, and article manufacturing method

Abstract

A measuring method includes performing preliminary measurement, while changing a combination of parameter values of at least two different measurement parameters, concerning each combination, performing processing to obtain a sensitivity distribution as a distribution of sensitivities indicating a change in measurement value with a change in parameter value concerning each of the at least two measurement parameters based on measurement values obtained in the performing preliminary measurement, determining a parameter value to be used concerning each of the at least two measurement parameters based on the sensitivity distribution concerning each of the at least two measurement parameters, and performing main measurement in accordance with the parameter value of each of the at least two measurement parameters determined in the determining.

Dependencies are inferred from the claim text.