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AssigneeRegents of the University of Minnesota
InventorsBharat Jalan, William Nunn, Anusha Kamath Manjeshwar
Estimating the term…
A system includes a vacuum chamber, and a substrate in the vacuum chamber includes a target surface. At least one effusion cell is in the vacuum chamber, wherein the effusion cell contains a solid metal-organic precursor compound with a vapor pressure of less than about 10−2 Torr at a temperature of about 25° C. to about 300° C. The effusion cell is configured to sublime the solid metal-organic precursor compound at a sublimation temperature greater than about 0° C. and less than about 200° C. such that a stream of metal particles from the solid metal-organic precursor compound emanate from the effusion cell are directed toward to the target surface of the substrate to form a coating thereon.
A system, comprising:
A method for making a coating, the method comprising:
A metal coating on a substrate, wherein the metal coating is formed from a stream of metal particles derived from subliming at a sublimation temperature of greater than about 0° C. and up to about 200° C. a solid metal-organic precursor compound having a vapor pressure of less than about 10−2 Torr at a temperature of about 25° C. to about 300° C.
Dependencies are inferred from the claim text.