Selective deposition of material comprising noble metal

A vapor deposition assembly for depositing a noble material comprising noble metal on a substrate, the vapor deposition assembly comprising:

• one or more reaction chambers constructed and arranged to hold a substrate comprising a first surface and a second surface, the first surface comprising a first material and the second surface comprising a second material;
• a precursor injector system constructed and arranged to provide a noble metal precursor and a reactant in the reaction chamber;
• a noble metal precursor source vessel constructed and arranged to hold a noble metal precursor in fluid communication with the reaction chamber;
• and
• a reactant source vessel constructed and arranged to hold a reactant in fluid communication with the reaction chamber;
• wherein the noble metal precursor comprises a noble metal β-diketonate compound.