Continuous atmospheric pressure cvd tow coater process with in-situ air leak monitoring

Abstract

A system for chemical vapor deposition coating of fiber tows includes a coater having a housing having a tow entrance and a tow exit and defining an interior space, the coater further having a process gas inlet and a process gas outlet; at least one of an entrance side marker gas inlet at the tow entrance and an exit side marker gas inlet at the tow exit; and at least one of an entrance side detection probe upstream of the entrance side marker gas inlet, and an exit side detection probe downstream of the exit side marker gas inlet, the at least one entrance side detection probe and exit side detection probe being configured to detect marker gas. A method is also disclosed.

Dependencies are inferred from the claim text.