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US 2023/0405729 A1Published application
Imaging head, control system, and processing system
AssigneeNikon Corporation
InventorsToshimitsu KURAMI, Koichi YASUBA
Life of this patent
Estimating the term…
Abstract
An imaging head includes: a deflection optical system configured to deflect light from at least a part of a melt pool part, the melt pool part is formed on the object by an irradiation with a processing beam from the processing head; an imaging apparatus configured to optically receive the light deflected by the deflection optical system to capture an image of at least a part of the melt pool part; and a supply unit configured to supply gas from a gas supply apparatus to at least a part of an optical surface of the deflection optical system.
Claims52
1-79. (canceled)
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- an imaging apparatus configured to generate an object image by capturing an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a change apparatus configured to change a relative position of a beam irradiation position relative to the object, the beam irradiation position being irradiated with the processing beam on the object;
- a characteristic information generation apparatus configured to generate, based on the object image and information related to a direction in which the relative position is changed by the change apparatus, characteristic information related to a characteristic of the melt pool part;
- and
- a control apparatus configured to control a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- an imaging apparatus configured to generate an object image by capturing an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a change apparatus configured to change a relative position of a beam irradiation position relative to the object, the beam irradiation position being irradiated with the processing beam on the object;
- a control apparatus configured to correct the object image based on information related to a direction in which the relative position is changed by the change apparatus;
- and
- a display apparatus configured to display the object image.
4 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- a plurality of imaging apparatuses each of which is configured to generate an object image by capturing an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a change apparatus configured to change a relative position of a beam irradiation position relative to the object, the beam irradiation position being irradiated with the processing beam on the object;
- a characteristic information generation apparatus configured to generate, based on the object image generated by at least one of the plurality of imaging apparatuses and information related to a direction in which the relative position is changed by the change apparatus, characteristic information related to a characteristic of the melt pool part;
- and
- a control apparatus configured to control a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- an imaging apparatus configured to generate an object image by capturing an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a first change apparatus configured to change a relative position of a beam irradiation position relative to the object, the beam irradiation position being irradiated with the processing beam on the object;
- a second change apparatus configured to change a position of the imaging apparatus based on information related to a direction in which the relative position is changed by the first change apparatus;
- a characteristic information generation apparatus configured to generate, based on the object image generated by the imaging apparatus at a position changed by the second change apparatus, characteristic information related to a characteristic of the melt pool part;
- and
- a control apparatus configured to control a characteristic of the processing beam based on the characteristic information.
5 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- a detection apparatus configured to optically receive light from at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a characteristic information generation apparatus configured to generate, based on a detected result by the detection apparatus and processing information related to a processing of the object, characteristic information related to a characteristic of the melt pool part;
- and
- a control apparatus configured to control a characteristic of the processing beam based on the characteristic information.
3 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- a detection apparatus configured to optically receive light from at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- and
- a display apparatus configured to correct and display a detected result by the detection apparatus based on processing information related to a processing of the object.
2 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- a plurality of detection apparatuses each of which is configured to optically receive light from at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- and
- a characteristic information generation apparatus configured to generate, based on a detected result by at least one of the plurality of detection apparatuses and processing information related to a processing of the object, characteristic information related to a characteristic of the melt pool part;
- and
- a control apparatus configured to control a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- a detection apparatus configured to optically receive light from at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a change apparatus configured to change a position of the imaging apparatus based on processing information related to a processing of the object;
- a characteristic information generation apparatus configured to generate, based on the detected result by the detection apparatus at a position changed by the change apparatus, characteristic information related to a characteristic of the melt pool part;
- and
- a control apparatus configured to control a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- an imaging apparatus configured to generate an object image by capturing an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a change apparatus configured to change a relative position of a beam irradiation position relative to the object, the beam irradiation position being irradiated with the processing beam on the object;
- a characteristic information generation apparatus configured to generate, based on the object image and a location of a build object formed by the processing beam, characteristic information related to a characteristic of the melt pool part;
- and
- a control apparatus configured to control a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- an imaging apparatus configured to generate an object image by capturing an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a change apparatus configured to change a relative position of a beam irradiation position relative to the object, the beam irradiation position being irradiated with the processing beam on the object;
- a control apparatus configured to correct the object image based on a location of a build object formed by the processing beam;
- and
- a display apparatus configured to display the object image.
4 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- an irradiation optical system configured to irradiate the object with the processing beam;
- a plurality of imaging apparatuses each of which is configured to generate an object image by capturing an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- a change apparatus configured to change a relative position of a beam irradiation position relative to the object, the beam irradiation position being irradiated with the processing beam on the object;
- a characteristic information generation apparatus configured to generate, based on the object image generated by at least one of the plurality of imaging apparatuses and a location of a build object formed by the processing beam, characteristic information related to a characteristic of the melt pool part;
- and
- a control apparatus configured to control a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- generating an object image by using an imaging apparatus configured to capture an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- changing a relative position of a beam irradiation position relative to the object by using a change apparatus, the beam irradiation position being irradiated with the processing beam on the object;
- generating, based on the object image and information related to a direction in which the relative position is changed by the change apparatus, characteristic information related to a characteristic of the melt pool part;
- and
- controlling a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- generating an object image by using an imaging apparatus configured to capture an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- changing a relative position of a beam irradiation position relative to the object by using a change apparatus, the beam irradiation position being irradiated with the processing beam on the object;
- correcting the object image based on information related to a direction in which the relative position is changed by the change apparatus;
- and
- displaying the object image.
4 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- generating an object image by using at least one of a plurality of imaging apparatuses each of which is configured to capture an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- changing a relative position of a beam irradiation position relative to the object by using a change apparatus, the beam irradiation position being irradiated with the processing beam on the object;
- generating, based on the object image generated by at least one of the plurality of imaging apparatuses and information related to a direction in which the relative position is changed by the change apparatus, characteristic information related to a characteristic of the melt pool part;
- and
- controlling a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- generating an object image by using an imaging apparatus configured to capture an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- changing a relative position of a beam irradiation position relative to the object by using a first change apparatus, the beam irradiation position being irradiated with the processing beam on the object;
- changing a position of the imaging apparatus based on information related to a direction in which the relative position is changed by the first change apparatus by using a second change apparatus;
- generating, based on the object image generated by the imaging apparatus at a position changed by the second change apparatus, characteristic information related to a characteristic of the melt pool part;
- and
- controlling a characteristic of the processing beam based on the characteristic information.
5 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- optically receiving light from at least a part of a melt pool part by using a detection apparatus, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- generating, based on a detected result by the detection apparatus and processing information related to a processing of the object, characteristic information related to a characteristic of the melt pool part;
- and
- controlling a characteristic of the processing beam based on the characteristic information.
3 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- optically receiving light from at least a part of a melt pool part by using a detection apparatus, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- and
- correcting and displaying a detected result by the detection apparatus based on processing information related to a processing of the object.
2 more elements
A processing system configured to process an object by irradiating the object with a processing beam,
- the processing system comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- optically receiving light from at least a part of a melt pool part by using a plurality of detection apparatuses, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- generating, based on a detected result by at least one of the plurality of detection apparatuses and processing information related to a processing of the object, characteristic information related to a characteristic of the melt pool part;
- and
- controlling a characteristic of the processing beam based on the characteristic information.
3 more elements
A processing method for process an object by irradiating the object with a processing beam,
- the processing system comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- optically receiving light from at least a part of a melt pool part by using a detection apparatus, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- changing a position of the imaging apparatus based on processing information related to a processing of the object by using a change apparatus;
- generating, based on the detected result by the detection apparatus at a position changed by the change apparatus, characteristic information related to a characteristic of the melt pool part;
- and
- controlling a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- generating an object image by using an imaging apparatus configured to capture an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- changing a relative position of a beam irradiation position relative to the object by using a change apparatus, the beam irradiation position being irradiated with the processing beam on the object;
- generating, based on the object image and a location of a build object formed by the processing beam, characteristic information related to a characteristic of the melt pool part;
- and
- controlling a characteristic of the processing beam based on the characteristic information.
4 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- generating an object image by using an imaging apparatus configured to capture an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- changing a relative position of a beam irradiation position relative to the object by using a change apparatus, the beam irradiation position being irradiated with the processing beam on the object;
- correcting the object image based on a location of a build object formed by the processing beam;
- and
- displaying the object image.
4 more elements
A processing method for processing an object by irradiating the object with a processing beam,
- the processing method comprising:
- irradiating the object with the processing beam by using an irradiation optical system;
- generating an object image by using at least one of a plurality of imaging apparatuses each of which is configured to capture an image of at least a part of a melt pool part, the melt pool part being formed on the object by an irradiation with the processing beam from the irradiation optical system;
- changing a relative position of a beam irradiation position relative to the object by using a change apparatus, the beam irradiation position being irradiated with the processing beam on the object;
- generating, based on the object image generated by at least one of the plurality of imaging apparatuses and a location of a build object formed by the processing beam, characteristic information related to a characteristic of the melt pool part;
- and
- controlling a characteristic of the processing beam based on the characteristic information.
4 more elements
Dependencies are inferred from the claim text.