Substrate carrier made of glass for processing a substrate and a method for manufacture of the substrate carrier

A method for producing a plate-shaped substrate carrier with a first upper side serving as substrate support and a lower side facing away from the upper side, the method comprising:

• producing different modifications in the substrate carrier by laser radiation in each case along a beam axis;
• and then
• producing conical recesses to form a structuring on the substrate support and/or the lower side of the substrate carrier by action of an etching medium and by successive etching as a result of anisotropic material removal in respective regions of the modifications in the substrate carrier, wherein the different modifications provide that the conical recesses adjoin and/or merge into one another, with at least one of the conical recesses being configured as a through-hole of the substrate carrier between the substrate support and the lower side, and a plurality of other ones of the conical recesses being configured as depressions without perforations.