Moving assembly for recovery guard and substrate processing apparatus

A moving assembly for a recovery guard, comprising:

• a recovery vessel including a first recovery vessel surrounding a substrate support and a second recovery vessel disposed inside of the first recovery vessel and having the same center line as a center line of the first recovery vessel;
• and
• a lifting driver connected to the first and second recovery vessels and elevating the first and second recovery vessels,
• wherein the lifting driver includes a first motor and a second motor disposed adjacent to each other, a first shaft connected to the first motor and the first recovery vessel and moving in a first direction by driving the first motor, a second shaft connected to the second motor and the second recovery vessel and moving in the first direction by driving the second motor, a first connecting portion connecting the first shaft and the first recovery vessel, and a second connecting portion connecting the second shaft and the second recovery vessel at the same azimuthal angle as a first housing from the center line, and
• the lifting driver includes a first lifting driver disposed on one side of the first and second recovery vessels and a second lifting driver disposed in a position symmetrical to the first lifting driver with respect to the center line.

A substrate processing apparatus comprising:

• a substrate support rotating while supporting a substrate;
• a treatment liquid supply unit supplying a treatment liquid to the substrate;
• and
• a moving assembly for a recovery guard, including a recovery vessel recovering the treatment liquid scattered from the substrate, and a lifting driver connected to the recovery vessel and elevating the recovery vessel,
• wherein the recovery vessel includes a first recovery vessel surrounding the substrate support, a second recovery vessel disposed inside of the first recovery vessel concentrically with respect to the first recovery vessel, a third recovery vessel disposed inside of the second recovery vessel concentrically with respect to the first recovery vessel, and a fourth recovery vessel disposed inside of the third recovery vessel concentrically with respect to the first recovery vessel,
• the lifting driver includes a first lifting driver connected to the first and second recovery vessels, a second lifting driver disposed in a position symmetrical to the first lifting driver at a center line of the recovery vessel on a plane and connected to the first and second recovery vessels, a third lifting driver connected to the third and fourth recovery vessels, and a fourth lifting driver disposed in a position symmetrical to the third lifting driver with respect to a center line of the recovery vessel and connected to the third and fourth recovery vessels, and
• the first to fourth lifting drivers respectively include first and second motors disposed adjacently to each other, a first shaft connected to the first motor and the first recovery vessel and moving in a first direction by driving the first motor, a second shaft connected to the second motor and the second recovery vessel and moving in the first direction by driving the second motor, a first connecting portion connecting the first shaft and the first recovery vessel, and a second connecting portion connecting the second shaft and the second recovery vessel at the same azimuthal angle as a first housing from the center line.