Moving assembly for recovery guard and substrate processing apparatus

A moving assembly for a recovery guard, comprising:

• a recovery vessel including a first recovery vessel disposed to surround a substrate support, and a second recovery vessel disposed inside of the first recovery vessel while having the same centerline as a centerline of the first recovery vessel;
• and
• a lifting driver connected to the first and second recovery vessels and elevating the first and second recovery vessels,
• wherein the lifting driver includes a motor, a drive shaft connected to the motor and rotated in a first direction, a first shaft connected to the first recovery vessel and extending in a second direction, perpendicular to the first direction, a second shaft connected to the second recovery vessel and extending in the second direction, a first clutch connected to the drive shaft and transmitting or blocking rotation of the drive shaft, a second clutch connected to the drive shaft and transmitting or blocking rotation of the drive shaft, a first pulley connected to the first clutch, a second pulley connected to the second clutch, a third pulley disposed in a position spaced apart from the first pulley in the second direction, connected to the first pulley by a first belt, and rotated together therewith, a fourth pulley disposed in a position spaced apart from the second pulley in the second direction, connected to the second pulley by a second belt, and rotated together therewith, a first brake disposed on a rotation shaft of the third pulley, and a second brake disposed on a rotation shaft of the fourth pulley, and
• the lifting driver includes a first lifting driver disposed on one side of the first and second recovery vessels and a second lifting driver disposed in a position symmetrical to the first lifting driver with respect to the centerline.

A substrate processing apparatus comprising:

• a substrate support rotating while supporting a substrate;
• a treatment liquid supply unit supplying a treatment liquid to the substrate;
• and
• a moving assembly for a recovery guard, including a recovery vessel recovering the treatment liquid scattered from the substrate, and a lifting driver connected to the recovery vessel and elevating the recovery vessel,
• wherein the recovery vessel includes a first recovery vessel surrounding the substrate support, a second recovery vessel disposed inside of the first recovery vessel concentrically with respect to the first recovery vessel, a third recovery vessel disposed inside of the second recovery vessel concentrically with respect to the first recovery vessel, and a fourth recovery vessel disposed inside of the third recovery vessel concentrically with respect to the first recovery vessel,
• the lifting driver includes a first lifting driver connected to the first and second recovery vessels, a second lifting driver disposed in a position symmetrical to the first lifting driver with respect to a centerline of the recovery vessel on a plane and connected to the first and second recovery vessels, a third lifting driver connected to the third and fourth recovery vessels, and a fourth lifting driver disposed in a position symmetrical to the third lifting driver with respect to a centerline of the recovery vessel and connected to the third and fourth recovery vessels, and
• the first to fourth lifting drivers include a motor, a drive shaft connected to the motor and rotated in a first direction, a first shaft connected to the first recovery vessel and extending in a second direction, perpendicular to the first direction, a second shaft connected to the second recovery vessel and extending in the second direction, a first clutch connecting the drive shaft and the first shaft, and a second clutch connecting the drive shaft and the second shaft.