Zeolite membrane production method, gas adsorbent, and gas adsorption device

A zeolite membrane production method for forming a zeolite membrane on a surface of an object by performing an ALD cycle in a reaction vessel,

• the ALD cycle including a silicon oxide film forming step and an aluminum oxide film forming step,
• the silicon oxide film forming step including:
• a first step of filling an organic Si compound as a first raw material gas into the reaction vessel,
• a second step of exhausting the first raw material gas from the reaction vessel,
• a third step of filling OH radicals as a reaction gas into the reaction vessel, and
• a fourth step of exhausting the reaction gas from the reaction vessel,
• the aluminum oxide film forming step including:
• a fifth step of filling an organic Al compound as a second raw material gas into the reaction vessel,
• a sixth step of exhausting the second raw material gas from the reaction vessel,
• a seventh step of filling OH radicals as a reaction gas into the reaction vessel,
• an eighth step of exhausting the reaction gas from the reaction vessel, and
• the silicon oxide films and the aluminum oxide films being alternately formed in forward or reverse order.