Display device and method of manufacturing the same

Abstract

A display device includes a base substrate, a first active pattern disposed on a base substrate, a second active pattern disposed on a first active pattern and including a material different from a material of a first active pattern, and an interlayer insulating layer disposed on a second active pattern and having Si—O bonds and Si—F bonds on a surface thereof, where a contact hole is defined through the interlayer insulating layer. The number of the Si—O bonds on the surface of the interlayer insulating layer is greater than the number of the Si—F bonds on the surface of the interlayer insulating layer.

Dependencies are inferred from the claim text.