Defect-tolerant, self-healing vcsel array architectures with vcsel devices having integrated fuse structures

An emitter array, comprising:

• a plurality of light emitting devices electrically connected in series and/or parallel on a substrate, wherein the light emitting devices respectively comprise:
• a semiconductor structure comprising an n-type layer, an active region, and a p-type layer;
• first and second electrical contacts on the n-type layer and the p-type layer, respectively;
• and
• an integrated fuse structure in or on the semiconductor structure and electrically coupled to the first and/or second electrical contacts,
• wherein the integrated fuse structure is actuatable to provide an electrically open state responsive to a control signal.

A method of fabricating a light emitting device, the method comprising:

• forming a semiconductor structure comprising an n-type layer, an active region, and a p-type layer;
• forming first and second electrical contacts on the n-type layer and the p-type layer, respectively;
• and
• providing an integrated fuse structure in or on the semiconductor structure and electrically coupled to the first and/or second electrical contacts,
• wherein the integrated fuse structure is actuatable to provide an electrically open state responsive to a control signal.

A method of operating an emitter array comprising a plurality of light emitting devices electrically connected in series and/or parallel, the method comprising:

• performing, by one or more control circuits, operations comprising:
• detecting a failure of at least one of the light emitting devices, wherein the at least one of the light emitting devices comprises an integrated fuse structure in or on a semiconductor structure thereof and electrically coupled to first and/or second electrical contacts thereof;
• and
• applying a control signal to the at least one of the light emitting devices, wherein the integrated fuse structure is actuatable to provide an electrically open state responsive to the control signal.