Integration of solar cell and image sensor

A structure, comprising:

• a plurality of microlens features;
• a color filter array disposed on the plurality of microlens features;
• a first metal grid over the color filter array;
• a first substrate over the first metal grid;
• an interconnect structure over the first substrate;
• and
• a second substrate over the interconnect structure,
• wherein the second substrate comprises a top texture region,
• wherein the interconnect structure comprises a capacitor structure.

A method, comprising:

• forming a solar cell in a first substrate;
• forming a first bonding layer over a back side of the first substrate;
• forming an image sensor array in a second substrate;
• forming an interconnect structure over a front side of the second substrate;
• forming a second bonding layer over the interconnect structure;
• bonding the solar cell to the image sensor array by bonding the first bonding layer to the second bonding layer;
• after the bonding, forming a color filter array over a back side of the second substrate;
• and
• forming microlens features over the color filter array.