Integrated circuit structures including backside vias
AssigneeIntel Corporation
InventorsNicholas A. Thomson, Kalyan C. Kolluru, Adam Clay Faust, Frank Patrick O'Mahony, Ayan Kar, Rui Ma
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AssigneeIntel Corporation
InventorsNicholas A. Thomson, Kalyan C. Kolluru, Adam Clay Faust, Frank Patrick O'Mahony, Ayan Kar, Rui Ma
Estimating the term…
Disclosed herein are integrated circuit (IC) structures including backside vias, as well as related methods and devices. In some embodiments, an IC structure may include: a device layer, wherein the device layer includes a plurality of active devices; a first metallization layer over the device layer, wherein the first metallization layer includes a first conductive pathway in conductive contact with at least one of the active devices in the device layer; a second metallization layer under the device layer, wherein the second metallization layer includes a second conductive pathway; and a conductive via in the device layer, wherein the conductive via is in conductive contact with at least one of the active devices in the device layer and also in conductive contact with the second conductive pathway.
1-20. (canceled)
An integrated circuit (IC) structure, comprising:
A fin-based IC structure, comprising:
An IC, comprising:
Dependencies are inferred from the claim text.