Multi charged particle beam evaluation method, multi charged particle beam writing method, inspection method for aperture array substrate for multi charged particle beam irradiation apparatus, and computer-readable recording medium

A computer-readable recording medium storing a multi charged particle beam evaluation program for evaluating trajectories of a plurality of individual beams in a multi charged particle beam which has passed through a plurality of openings provided in an aperture array substrate, the program causing a computer to execute the steps of:

• measuring positions of the plurality of individual beams at each of a plurality of heights, in an optical axis direction, of an imaging plane of the multi charged particle beam, or a measurement plane on which a mark for beam position measurement is formed, the plurality of heights being different from each other;
• and
• extracting a singular beam in which a beam trajectory has changed among the plurality of individual beams based on a position difference, the position difference being a difference between beam positions of the plurality of individual beams measured at each of the plurality of heights.