Object table, stage apparatus, holding method and lithographic apparatus
AssigneeASML Netherlands B.V.
InventorsMichael Marinus Anna STEUR, Bas JANSEN, Andre Bernardus JEUNINK, Johannes Adrianus Cornelis Maria PIJNENBURG
Life of this patent
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Abstract
An object table including: a holding surface for holding an object; and an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.
Claims24
An object table comprising:
- a holding surface configured to hold an object;
- an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface, by selectively adjusting the holding force on the object.
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A method of holding an object to a holding surface of an object table, the method comprising:
- exerting a holding force on the object to hold the object to the holding surface;
- and
- decreasing a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface, by selectively adjusting the holding force on the object.
Dependencies are inferred from the claim text.