Methods and computer programs for configuration of a sampling scheme generation model

A method for providing a decision on stopping or continuing performing measurements on sampling locations on one more substrates, the method comprising:

• obtaining an initial set of measurement values corresponding to an initial sampling scheme;
• obtaining a model comprising:
• i) a first model trained to infer from a set of measurement values whether one or more requirements imposed by a process monitoring and/or process control strategy are met;
• and ii) a second model trained to infer from a set of measurement values that one or more further measurement values need to be acquired before meeting the requirements imposed by the process monitoring and/or process control strategy;
• and
• inputting the initial set of measurement values to the model to obtain the decision, wherein the decision is based on balancing the output of the first and the second model.