Film forming method, film forming apparatus, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsKENJI YOSHIDA, HIROYUKI KOIDE, YUMA ONIZAWA
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AssigneeCanon Kabushiki Kaisha
InventorsKENJI YOSHIDA, HIROYUKI KOIDE, YUMA ONIZAWA
Estimating the term…
A film forming method includes discretely arranging, on a substrate, a plurality of droplets of a curable composition containing a polymerizable compound that is a nonvolatile component, and a solvent that is a volatile component, analyzing an image obtained by capturing a process in which each of the plurality of droplets is connected to an adjacent droplet on the substrate, thereby forming a continuous liquid film on the substrate, volatilizing the solvent contained in the liquid film by enhancing a solvent volatilization effect as compared to the process of forming the liquid film, and forming a cured film by curing the liquid film, wherein if an analysis result obtained in the analyzing satisfies a predetermined condition representing that a forming state of the liquid film is sufficient, a process advances to the volatilizing and then advances to the forming.
A film forming method comprising:
A film forming apparatus comprising:
Dependencies are inferred from the claim text.