Pellicle frame and pellicle
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYu YANASE
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Abstract
The present invention is to provide a pellicle frame characterized by including a metal or alloy having a linear expansion coefficient of 10×10−6 (1/K) or less and further a density of 4.6 g/cm3 or less, and a pellicle characterized by including the pellicle frame as an element.
Claims27
A pellicle frame having a thickness of at least 1.4 mm but less than 2.5 mm and having a plurality of holes provided on an outer side face, wherein the size of the holes is at least 1.0 mm in length in a thickness direction of the frame and the frame is formed of a metal or an alloy.
A pellicle frame having a thickness of at least 1.4 mm but less than 2.5 mm and having a plurality of holes provided on a side face, wherein the size of the holes is at least 1.0 mm in length in a thickness direction of the frame and the frame is formed of a metal or an alloy.
Dependencies are inferred from the claim text.