Pedestal heater block having asymmetric heating wire structure

A pedestal heater block having an asymmetrical hot-wire structure, with respect to the pedestal heater block for a chemical vapor deposition machine, in which a structure intended for causing a vacuum to be applied is installed on a surface so that a wafer can be fixed by vacuum absorption, and which comprises:

• gas supply holes distributed to supply gas for temperature uniformity onto a back side of the wafer;
• and
• a hot wire configured to apply heat to the wafer,
• wherein backside pressure applied to the back side of the wafer by the structure of causing the vacuum to be applied and the gas supply holes is fixed to be 3 torr or below of low pressure, the heater block is composed of aluminum or an aluminum alloy, and the hot wire is composed in a cartridge form,
• wherein the hot wire is installed to have higher installation density in a central part of the heater block than that in a neighborhood part which is an outer side of the heater block.