Method of cleaning ultrafiltration membrane module and management method of ultrapure water manufacturing system using same
AssigneeSamsung Electronics Co., Ltd.
InventorsWuyoung Choi, Cheolmin Shin, Seungyong Yang, Younhaeng Lee, Changyeol Ham
Life of this patent
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Abstract
A method of cleaning an ultrafiltration membrane module includes installing an ultrafiltration membrane in an ultrafiltration membrane module, supplying deionized water to the ultrafiltration membrane module, and flushing the ultrafiltration membrane module with the deionized water by increasing decreasing a flow rate of the deionized water supplied to the ultrafiltration membrane module.
Claims20
A method of cleaning an ultrafiltration membrane module, the method comprising:
- installing an ultrafiltration membrane in an ultrafiltration membrane module;
- supplying deionized water to the ultrafiltration membrane module;
- and
- flushing the ultrafiltration membrane module with the deionized water by increasing and decreasing a flow rate of the deionized water supplied to the ultrafiltration membrane module.
A management method of an ultrapure water manufacturing system, the method comprising:
- selecting a first ultrafiltration membrane module requiring replacement of an ultrafiltration membrane from among a plurality of ultrafiltration membrane modules:
- replacing an ultrafiltration membrane in the first ultrafiltration membrane module;
- supplying deionized water to the first ultrafiltration membrane module;
- flushing the first ultrafiltration membrane module with the deionized water by increasing and decreasing a flow rate of the deionized water supplied to the first ultrafiltration membrane module;
- measuring a particle concentration of treated water flowing out from the first ultrafiltration membrane module using a particle counter;
- and
- when the measured particle concentration is less than or equal to a reference value, stopping the supply of deionized water to the first ultrafiltration membrane module.
The management method of an ultrapure water manufacturing system of claim wherein, in a process in which the flow rate of the deionized water flowing into the first ultrafiltration membrane module is increased, the particles or the gas are removed.
A management method of an ultrapure water manufacturing system, the method comprising:
- in an ultrapure water manufacturing line including an ultrafiltration membrane module, closing a first valve connected to a supply unit of the ultrafiltration membrane module;
- replacing ultrafiltration membranes in the ultrafiltration membrane module;
- supplying deionized water to the ultrafiltration membrane module by opening a second valve connecting the supply unit of the ultrafiltration membrane module and a deionized water supply unit to each other;
- flushing the ultrafiltration membrane module with the deionized water by increasing a flow rate of the deionized water supplied to the ultrafiltration membrane module from a first flow rate to a second flow rate;
- measuring a particle concentration of treated water flowing out from the ultrafiltration membrane module using a particle counter;
- and
- when the measured particle concentration is less than or equal to a reference value, stopping the supply of deionized water to the ultrafiltration membrane module in the ultrapure water manufacturing line by closing the second valve, and subsequently opening the first valve.
Dependencies are inferred from the claim text.