Electrical discharge machining of semiconductors
AssigneeNielson Scientific, LLC
InventorGregory NIELSON
Life of this patent
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Abstract
An electrical discharge machining system includes a semiconductor workpiece, a voltage source, an EDM tool, and an illumination system. The illumination system is configured to illuminate the semiconductor workpiece in order to increase the conductivity of the semiconductor workpiece. The voltage source establishes an electric potential difference between the workpiece and the EDM tool while the illumination system illuminates the semiconductor workpiece. The electric potential difference is such that an electrical discharge occurs between the workpiece and the EDM tool, thereby removing material from the workpiece.
Claims20
An electrical discharge machining (EDM) system, comprising:
- a workpiece, the workpiece comprising a semiconductor material;
- an EDM tool;
- a voltage source that is electrically connected to the EDM tool and the workpiece;
- an illumination system that is configured to illuminate the workpiece with light having a photon energy that is less than or equal to 110% of a bandgap energy of the semiconductor material;
- and
- a controller that is configured to control the voltage source to establish an electric potential difference between the workpiece and the EDM tool such that an electrical discharge occurs between the workpiece and the EDM tool, wherein the electrical discharge causes material to be removed from the workpiece.
A method for performing electrical discharge machining (EDM), comprising:
- obtaining a workpiece, the workpiece comprising a semiconductor material;
- illuminating the workpiece with light having a photon energy that is less than or equal to 110% of a bandgap energy of the semiconductor material;
- and
- applying a voltage between the workpiece and an EDM tool such that an electrical discharge occurs between the workpiece and the EDM tool, wherein the electrical discharge causes material to be removed from the workpiece.
A system for electrical discharge machining (EDM), comprising:
- a workpiece, the workpiece comprising a semiconductor material;
- an EDM tool;
- a voltage source that is electrically connected to the EDM tool and the workpiece;
- an illumination system that is configured to illuminate the workpiece with light;
- and
- a controller that is configured to control the voltage source to establish an electric potential difference of less than or equal to 400V between the workpiece and the EDM tool, wherein responsive to the electric potential difference being established an electrical discharge occurs between the workpiece and the EDM tool, wherein the electrical discharge causes material to be removed from the workpiece.
Dependencies are inferred from the claim text.