Polymerizable functional group-containing microballoon
AssigneeTokuyama Corporation
InventorsYasutomo SHIMIZU, Takayoshi KAWASAKI
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Abstract
A microballoon according to the present invention contains, in a surface layer of the microballoon, a polymerizable functional group having reactivity with an iso(thio)cyanate group, and the microballoon has a particle diameter of 10 μm to 200 μm. When the microballoon according to the present invention is used in a CMP polishing pad, excellent polishing characteristics and excellent durability of the polishing pad can be exhibited.
Claims9
A microballoon comprising a surface layer and having a particle diameter of 10 μm to 200 μm, the surface layer having a polymerizable functional group having reactivity with an iso(thio)cyanate group.
Dependencies are inferred from the claim text.