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US 2023/0390878 A1Published application
Apparatus for and method of processing workpiece
AssigneeDisco Corporation
InventorKazuma SEKIYA
Life of this patent
Estimating the term…
Abstract
An apparatus for processing a workpiece includes a holding table having a holding surface for holding the workpiece thereon, a processing unit for processing the workpiece held on the holding surface of the holding table, and a table cover for covering the holding surface when the workpiece is not held on the holding surface. The table cover has a contact surface for contacting at least the holding surface of the holding table, the contact surface being adhesive in nature.
Claims7
An apparatus for processing a workpiece, comprising:
- a holding table having a holding surface for holding the workpiece thereon;
- a processing unit for processing the workpiece held on the holding surface of the holding table;
- and
- a table cover for covering the holding surface when the workpiece is not held on the holding surface,
- wherein the table cover has a contact surface for contacting at least the holding surface of the holding table, the contact surface being adhesive in nature.
2 more elements
A method of processing a workpiece, comprising:
- a holding step of delivering the workpiece from a cassette to a holding table with use of a delivery unit and holding the workpiece on a holding surface of the holding table;
- a processing step of processing the workpiece held on the holding surface with use of a processing unit;
- and
- a table cover holding step of holding a table cover on the holding surface when the workpiece is not held on the holding surface.
1 more element
Dependencies are inferred from the claim text.