Fibre-optic accelerometer
AssigneeFos4X GmbH
InventorsSascha Kienitz, Laura Lohr, Markus Brams
Life of this patent
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Abstract
The invention relates to a fibre-optic accelerometer for determining acceleration along an axis, comprising an optical fibre with a fibre end face and an acoustic membrane with a membrane frame, a deflection mass and connection bridges, the acoustic membrane being designed to reflect, at least in part, a primary radiation from the fibre end face, and the connection bridges connecting the membrane frame and the deflection mass at least at two different axial positions.
Claims20
A fiber optical acceleration sensor for determining an acceleration along an axis, comprising
- an optical fiber with a fiber end face;
- and
- an acoustic membrane with a membrane frame, a deflection mass and connection bridges;
- wherein the acoustic membrane is adapted to at least partially reflect a primary radiation exiting from the fiber end face;
- and
- wherein the connection bridges connect the membrane frame and the deflection mass at at least two axial positions different from each other.
A method for the manufacture of a fiber optical acceleration sensor for determining an acceleration along an axis, the method comprising steps of:
- provision of a transparent substrate;
- and
- selective laser etching of an acoustic membrane from the transparent substrate, wherein the acoustic membrane comprises a membrane frame, a deflection mass and connection bridges;
- and wherein the connection bridges connect the membrane frame and the deflection mass at at least two axial positions different from each other.
Dependencies are inferred from the claim text.