Semiconductor device
AssigneeRenesas Electronics Corporation
InventorsNobuhito SHIRAISHI, Naohito SUZUMURA
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AssigneeRenesas Electronics Corporation
InventorsNobuhito SHIRAISHI, Naohito SUZUMURA
Estimating the term…
A semiconductor device includes first and second interlayer insulating films, first and second wirings, and a resistor film. The first wiring is disposed on the first interlayer insulating film. The second interlayer insulating film includes a first layer and a second layer. The first layer is disposed on the first interlayer insulating film so as to cover the first wiring. The resistor film is disposed on the first layer. The resistor film contains at least one selected from the group consisting of silicon chromium, silicon chromium into which carbon is introduced, nickel chromium, titanium nitride and tantalum nitride. The second layer is disposed on the first layer so as to cover the resistor film. The second wiring is disposed on the second layer. The resistor film is closer to the first wiring than to the second wiring in a thickness direction of the second interlayer insulating film.
A semiconductor device comprising:
Dependencies are inferred from the claim text.