Temperature regulating apparatus for semiconductor-device manufacturing equipment, and semiconductor-device manufacturing system

A temperature regulating apparatus for regulating a temperature of semiconductor-device manufacturing equipment, comprising:

• a heating section configured to produce a heating liquid;
• a cooling section configured to produce a cooling liquid;
• a heating-liquid delivery pipe coupled to the heating section, the heating-liquid delivery pipe being configured to deliver the heating liquid to the semiconductor-device manufacturing equipment;
• a cooling-liquid delivery pipe coupled to the cooling section, the cooling-liquid delivery pipe being configured to deliver the cooling liquid to the semiconductor-device manufacturing equipment;
• a heating-side return pipe coupled to the heating section, the heating-side return pipe being configured to return a liquid mixture of the heating liquid and the cooling liquid that have passed through the semiconductor-device manufacturing equipment to the heating section;
• a cooling-side return pipe coupled to the cooling section, the cooling-side return pipe being configured to return the liquid mixture that has passed through the semiconductor-device manufacturing equipment to the cooling section;
• and
• at least one of a heating-side heat exchanger configured to exchange heat between the heating liquid and the liquid mixture returning to the heating section and a cooling-side heat exchanger configured to exchange heat between the cooling liquid and the liquid mixture returning to the cooling section.