Computer-implemented method for generating event-averaged and time-resolved spectra

A computer-implemented method for generating event-averaged and time-resolved spectra, from a plurality of time-resolved spectra of charged particles emitted from a surface of a sample, at which surface an event is repeated cyclically, wherein the plurality of time-resolved spectra are obtained with a charged particle analyser, the method comprising the steps of

• receiving, from the charged particle analyser, the plurality of time-resolved spectra covering a plurality of events, wherein the time between events adjacent in time defines a time period, and wherein each of the plurality of time-resolved spectra comprises information on the distribution of charged particles as a function of a physical property for an interval of magnitudes for the physical property, characterized in that it also comprises the steps of
• obtaining at least one selected part of the series of time-resolved spectra, wherein the at least one selected part comprises spectra from at least a part of the interval of magnitudes for the physical property and a part of a time period when the event takes place,
• matching the at least one selected part with other parts of the series of time-resolved spectra to find similar parts, and thereby determining points in time for other events in the plurality of events, and
• generating the event-averaged and time-resolved spectra of the event based on the series of time-resolved charged particle energy spectra and the determined points in time.