Ceramic substrate, aln single crystal, aln whisker, and aln whisker composite
AssigneeU-MAP Co., Ltd.
InventorsMasaki Matsumoto, Shota Watanabe, Kenji Nishitani, Takahiro Maeda, Masashi Nagaya
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AssigneeU-MAP Co., Ltd.
InventorsMasaki Matsumoto, Shota Watanabe, Kenji Nishitani, Takahiro Maeda, Masashi Nagaya
Estimating the term…
Provided is a ceramic substrate having novel characteristics, capable of achieving thermal conductivity equal to or higher than that of a conventional ceramic substrate containing a granular aluminum nitride polycrystal in a base body thereof, and achieving fracture toughness superior to that of a conventional ceramic substrate containing a granular silicon nitride polycrystal in a base body thereof. A ceramic substrate according to the present embodiment contains a fibrous AlN single crystal.
A ceramic substrate comprising a fibrous AlN single crystal in a base body thereof.
A ceramic substrate comprising an AlN whisker in a base body thereof, the AlN whisker including a fibrous AlN single crystal having a hexagonal wurtzite structure and an oxygen-containing layer covering a surface of the AlN single crystal, wherein an oxygen concentration is 7.0 mass % or less.
A ceramic substrate comprising an AlN whisker composite including a plurality of AlN whiskers in a base body thereof, each of the plurality of AlN whiskers including a fibrous AlN single crystal having a hexagonal wurtzite structure and an oxygen-containing layer covering a surface of the AlN single crystal, wherein a content ratio of AlN whiskers having a diameter of less than 1.0 μm is 20 vol % or less.
A fibrous AlN single crystal having a hexagonal wurtzite structure, wherein a ratio of a (10-10) plane peak intensity to a (0002) plane peak intensity obtained when an X-ray is emitted to an end surface in a plate thickness direction is 2.00 or more.
An AlN whisker comprising a fibrous AlN single crystal having a hexagonal wurtzite structure and an oxygen-containing layer covering a surface of the AlN single crystal, wherein an oxygen concentration is 7.0 mass % or less.
An AlN whisker composite comprising a plurality of AlN whiskers, each of the plurality of AlN whiskers including a fibrous AlN single crystal having a hexagonal wurtzite structure and an oxygen-containing layer covering a surface of the AlN single crystal, wherein a content ratio of AlN whiskers having a diameter of less than 1.0 μm is 20 vol % or less.
Dependencies are inferred from the claim text.