Foreign matter inspection device
AssigneeHamamatsu Photonics K.K.
InventorsKunihiko TSUCHIYA, Toshiyasu SUYAMA
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AssigneeHamamatsu Photonics K.K.
InventorsKunihiko TSUCHIYA, Toshiyasu SUYAMA
Estimating the term…
A foreign matter inspection device includes: an X-ray application unit configured to apply an X-ray to an inspection object carried by a carriage unit; an X-ray detection unit configured to detect an X-ray transmitted by the inspection object and to output X-ray image data based on the detection result; an infrared ray application unit configured to apply an infrared ray to the inspection object carried by the carriage unit; and an infrared ray detection unit configured to detect the infrared ray from the inspection object and to output infrared image data based on the detection result. The infrared ray application unit and the infrared ray detection unit are covered by a protection unit formed of a member blocking the X-ray and transmitting the infrared ray.
A foreign matter inspection device configured to inspect whether foreign matter is included in an inspection object, the foreign matter inspection device comprising:
Dependencies are inferred from the claim text.