Piezoelectric laminate, production method for piezoelectric laminate, and piezoelectric element

A method of manufacturing a piezoelectric stack, comprising:

• depositing an output-side bottom electrode film and an input-side bottom electrode film on a substrate;
• depositing an output-side piezoelectric film, being an oxide film, on the output-side bottom electrode film;
• depositing a protective film that protects the output-side piezoelectric film;
• depositing an input-side piezoelectric film, being a nitride film, on the input-side bottom electrode film;
• exposing the output-side piezoelectric film by removing the protective film by etching;
• and
• depositing an output-side top electrode film on the output-side piezoelectric film and depositing an input-side top electrode film on the input-side piezoelectric film, thereby
• producing a stack in which an ultrasonic output part and an ultrasonic input part are placed in such a manner as not overlapping each other when viewed from a top surface of the substrate,
• the ultrasonic output part comprising a stacked part of the output-side bottom electrode film, the output-side piezoelectric film, and the output-side top electrode film,
• the ultrasonic input part comprising a stacked part of the input-side bottom electrode film, the input-side piezoelectric film, and the input-side top electrode film.