Transistor having wrap-around source/drain contacts
AssigneeInternational Business Machines Corporation
InventorsZhenxing Bi, Kangguo Cheng, Juntao Li, Peng Xu
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AssigneeInternational Business Machines Corporation
InventorsZhenxing Bi, Kangguo Cheng, Juntao Li, Peng Xu
Estimating the term…
Embodiments of the invention are directed to a field effect transistor (FET) device including a first channel region over a first region of a substrate; a second channel region over a second region of the substrate and adjacent to the first channel region; and a bottom conductive layer over a third region of the substrate and operable to form a bottommost component of a multi-component wrap-around source or drain (S/D) contact. The first region of the substrate, the second region of the substrate, and the third region of the substrate do not overlap. The bottom conductive layer includes a non-uniform height having a first section and a second section. The first section tapers downward toward the first channel region and the second section tapers downward toward the second channel region.
A field effect transistor (FET) device comprising:
A set of semiconductor devices comprising:
Dependencies are inferred from the claim text.