Display device, method of manufacturing the display device, and tiled display device including the display device

A method of manufacturing a display device, comprising:

• providing a substrate;
• providing a barrier insulating layer disposed on the substrate and including a first contact hole;
• forming a fan-out line disposed on the barrier insulating layer and including a protruding part inserted in the first contact hole and a recessed part formed by the first contact hole;
• forming an etching electrode on the fan-out line;
• etching the fan-out line and the etching electrode such that the etching electrode remains in the recessed part;
• forming a display layer on the fan-out line and the etching electrode;
• forming a second contact hole penetrating from below the substrate;
• and
• forming a flexible film disposed below the substrate, inserted in the second contact hole, and electrically connected to the protruding part of the fan-out line.

A tiled display device comprising:

• a plurality of display devices, each of the plurality of display devices having a display area including pixels, and a non-display area surrounding the display area;
• and
• a bonding member bonding the plurality of display devices to each other,
• wherein each of the display devices comprises:
• a first substrate including a first contact hole;
• a first barrier insulating layer disposed on the first substrate and including a second contact hole;
• a fan-out line disposed in a first metal layer on the first barrier insulating layer, the fan-out line including:
• a protruding part inserted in the second contact hole to protrude from below the first barrier insulating layer;
• and
• a recessed part formed by the second contact hole;
• an etching electrode disposed in the recessed part of the fan-out line;
• a second substrate disposed on the fan-out line and the etching electrode and including a third contact hole;
• a display layer disposed on the second substrate;
• and
• a flexible film disposed below the first substrate and inserted in the first contact hole to be electrically connected to the protruding part of the fan-out line.