Retaining arrangement for an optical element

Abstract

The disclosure relates to a retaining arrangement with a carrier platform (2), for example in laser systems, to which at least one optical element (3) is fixed. The disclosure specifies a retaining arrangement for optical elements which ensures improved beam position stability with as little effort as possible. For this purpose, the carrier platform (2) is connected to a base (8) at bearing points (5) via a respective elastically compliant and/or damping connecting structure (6). The connecting structure (6) is designed to elastically absorb thermal expansions of the carrier platform (2). The at least one optical element (3) is located at a neutral point (13) and/or on a neutral axis on the carrier platform (2), wherein this neutral point (13) or the neutral axis is positionally stable relative to the base (8) during thermal deformation of the carrier platform (2). The carrier platform (2) is connected to a heat sink or source (16) via an intermediate heat pump, for example in the form of a Peltier element (17), with a flexible, for example ribbon-shaped heat transfer element (15) without mechanical retroaction.

Dependencies are inferred from the claim text.