Multi-axis force sensing device and calibration method thereof

A calibration method of a multi-axis force sensing device, comprising:

• providing a multi-axis force sensing device, wherein the multi-axis force sensing device comprises a plurality of measurement shafts and a plurality of sensing groups disposed on the measurement shafts, and each of the sensing groups comprises a first strain sensing element and a second strain sensing element;
• applying a calibration force to the sensing groups at a first temperature to obtain first actual strain data, and applying the calibration force to the sensing groups at a second temperature to obtain second actual strain data;
• obtaining a first temperature calibration matrix according to the first actual strain data and the calibration force, and obtaining a second temperature calibration matrix according to the second actual strain data and the calibration force;
• obtaining a calibration coefficient matrix according to the first temperature calibration matrix and the second temperature calibration matrix;
• and
• obtaining a compensated calibration matrix according to a first temperature value, a second temperature value, the first temperature calibration matrix, and the calibration coefficient matrix.