Pressurized fluid supply system

Abstract

A pressurized fluid supply system capable of favorably resuming the supply of a pressurized fluid to a support member when the supply of the pressurized fluid from a fluid supply source returns to a normal state, includes: a fluid supply path for supplying the pressurized fluid from the fluid supply source to the support member that supports a member using the pressurized fluid; a solenoid valve provided on the fluid supply path; a pressure sensor that is provided on the fluid supply path between the fluid supply source and the solenoid valve and detects the pressure of the pressurized fluid; a flow rate sensor that is provided on the fluid supply path between the solenoid valve and the support member and detects the flow rate of the pressurized fluid; and a control unit that controls opening/closing of the solenoid valve.

Dependencies are inferred from the claim text.