Deposition mask apparatus, method of manufacturing deposition mask apparatus and method of manufacturing organic device

A deposition mask apparatus comprising:

• a frame having a first frame face, a second frame face located on an opposite side to the first frame face, a frame opening extending through from the first frame face to the second frame face;
• a deposition mask joined to the first frame face and having a plurality of through-holes overlapping the frame opening in plan view;
• and
• an alignment mask joined to the first frame face and arranged side by side with the deposition mask in a first direction, wherein
• the alignment mask has two first alignment mask holes located at positions different from each other in a second direction orthogonal to the first direction and overlapping the frame,
• a first weld joining the frame with the alignment mask is located in an outer side of the alignment mask in the second direction with respect to a corresponding one of the first alignment mask holes, and
• fifth welds joining the frame with the alignment mask, respectively, are located on both sides in the first direction with respect to a corresponding one of the first alignment mask holes.

A method of manufacturing a deposition mask apparatus, the method comprising:

• a preparation step of preparing a frame having a first frame face, a second frame face located on an opposite side to the first frame face, and a frame opening extending through from the first frame face to the second frame face;
• a first joining step of joining an alignment mask to the first frame face by a first weld and a second weld;
• and
• a second joining step of joining a deposition mask, having a plurality of through-holes overlapping the frame opening in plan view, to the first frame face so as to be arranged side by side with the alignment mask in a first direction, wherein
• the alignment mask has two first alignment mask holes located at positions different from each other in a second direction orthogonal to the first direction and overlapping the frame,
• the first weld is located in an outer side of the alignment mask in the second direction with respect to a corresponding one of the first alignment mask holes, and
• the second weld is located in an inner side of the alignment mask in the second direction with respect to a corresponding one of the first alignment mask holes.

A method of manufacturing a deposition mask apparatus, the method comprising:

• a preparation step of preparing a frame having a first frame face, a second frame face located on an opposite side to the first frame face, and a frame opening extending through from the first frame face to the second frame face;
• a first joining step of joining an alignment mask to the first frame face by a first weld and fifth welds;
• and
• a second joining step of joining a deposition mask, having a plurality of through-holes overlapping the frame opening in plan view, to the first frame face so as to be arranged side by side with the alignment mask in a first direction, wherein
• the alignment mask has two first alignment mask holes located at positions different from each other in a second direction orthogonal to the first direction and overlapping the frame,
• the first weld is located in an outer side of the alignment mask in the second direction with respect to a corresponding one of the first alignment mask holes, and
• the fifth welds, respectively, are located in both sides in the first direction with respect to a corresponding one of the first alignment mask holes.